extremeultraviolet相关论文
388 Extreme ultraviolet (EUV) images, which were obtained from December 24, 2013 to May 20, 2014 by the EUV Camera (EUVC......
先进光源的发展在前沿科学研究中发挥的作用越来越重要。近十年来, 飞速发展的自由电子激光技术为科学家们提供了探索未知世界、发......
为了提高对太阳活动等离子体运动速度探测的准确性,基于新型极紫外无缝成像光谱仪的五级次光谱成像设计,利用计算机断层成像和无缝......
Motivated by the achieved high intensities of novel extreme ultraviolet (XUV) radiation sources, such as free electron l......
极紫外光刻(EUVL)技术是目前193 nm浸没式光刻技术的延伸,有望突破30 nm或更小技术节点而成为下一代光刻(NGL)技术的主流。毛细管......
研究了极紫外宽带多层膜偏振光学元件,包括反射式检偏器与透射式相移片.基于Mo/Si非周期多层膜结构,采用解析与数值优化相结合的方......
实验研究了放电频率、电脉冲能量、碎屑缓冲气体流量等极紫外光源参数对极紫外辐照损伤测试系统聚焦光束性能的影响。测试结果表明......
薄膜沉积是滤片制备过程中的核心环节,优化薄膜沉积工艺对于提高薄膜滤片的稳定性具有重要意义。本课题组采用脉冲直流磁控溅射工......
Line identification of boron and nitrogen emissions in extreme-and vacuum-ultraviolet wavelength ran
An impurity powder dropper was installed in the 21st campaign of the Large Helical Device experiment(Oct.2019-Feb.2020)u......
